A fully automated, high performance E-beam writer hosted in a class 10,000 cleanroom with full 150 mm writing capability. This is the latest and fastest EBL within Australia to date, capable of delivering beam currents from 0.1 to 350 nA at100 kV, with a 125 Mhz pattern generator. The system has a maximum deflection up to 1 x 1 mm and can accommodate exposure settings with spot sizes from 2 nm to 350 nm (defocussed) automatically.

Location: Hawken Building #50 (Cleanroom L117)

Contact: Elliot Cheng h.cheng6@uq.edu.au

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