Ellipsometer
The Nanofilm EP3 Ellipsometer is a powerful non-destructive method to determine nanoscale film thickness and refractive index. The high precision optical instrument is equipped with a solid-state green laser of wavelength 532 nm and power of 50 mW. The sample stage table can move in X-Y-Z directions.
The ellipsometer exploits the principle of null ellipsometry by measuring state of polarisation of light at variable angles. The technique collects Delta and Phi ellipsometry parameters at variable incidence angle from 40 to 90 degrees. The collected Delta and Phi data can be modelled with different absorption properties to extract film thickness and refractive index.
The instrument is also capable of real time imaging of the thin film interface using a high-resolution CCD camera. The instrument is a useful tool to explore nanoscale interfaces and thickness, and has applications in the fields of semiconductors, solar cells and coatings.
System specification:
- Sample stage movement X-Y (100 mm) and Z (20 mm)
- Measure film thickness (>1 nm)
- Large area imaging in selected ROI at spatial resolution of 1 µm
- Single wavelength 532 nm (Green)
- Automated goniometer movement for angle of incidence (AOI) range 45 to 90 deg
- Δ and Ψ mapping
- Extract film thickness, refractive index
Location: Chemistry Building
Contact: Dr Vikram Raghuwanshi; v.raghuwanshi@uq.edu.au
Links:
Ellipsometer Sample Submission Form
Sample Identification Label - Large
Sample Identification Label - Small
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