Automated stylus profiler with a 150mm motorised stage capable of measuring and mapping surfaces with 4 Angstrom repeatability. This system has a vertical range of 1 mm and 1 Angstrom of vertical resolution (6.5 µm vertical range) with a single scan length up to 55 mm in length.

 

 

 

Location: Hawken Building #50 (Cleanroom L116)

Contact: Elliot Cheng h.cheng6@uq.edu.au

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