A new Queensland Government video gives a closer look inside The University of Queensland’s growing advanced photonics manufacturing capability, the National Advanced Photonics Facility (NAPF) and the infrastructure supporting advanced photonic and quantum research.
CMM and ANFF-Q (Australian National Fabrication Facility - Queensland Node), have been close partners with NAPF in developing this capability. Together, we provide advanced nanofabrication infrastructure to support the scaled production of integrated photonic devices.
The release of the video also comes with another major milestone at CMM’s nanolithography cleanroom. A major upgrade to the Raith EBPG5150 electron beam lithography system has now completed. The upgrade was supported through the Queensland Government’s Quantum and Advanced Technologies Commercialisation Infrastructure Program (QCIP), which also funded NAPF. The upgraded EBPG5150 can now support long unattended runs and 24/7 automated lithography production, with up to ten cassettes loaded and processed automatically. This makes it Australia’s highest throughput EBL system and the only production scale EBL capability in the country.
The 100 kV Raith EBPG5150 is used to make high resolution nanoscale structures for applications including integrated photonics, quantum technologies, meta surfaces, semiconductor devices and advanced sensors. The new automation capability allows CMM to better support users moving from individual research devices towards scaled production.
