Evident OLS5500 – Laser Scanning Confocal Microscope
Principles:
The OLS5500 is a high-resolution laser scanning confocal microscope designed for non-contact three-dimensional surface characterisation and dimensional metrology. Using a 405 nm laser and confocal optical sectioning, the system acquires precise topographical information with a minimal of 120nm lateral resolution and nanometre-scale height resolution. The OLS5500 combines high speed imaging, automated measurements, and advanced analysis capabilities, enabling accurate characterisation of complex surfaces and microstructures across a wide range of materials.
Suitable for:
- Surface roughness and texture measurements.
- Step height and thin film thickness measurements.
- 3D surface topography and profilometry.
- Semiconductor and microelectronics inspection.
- MEMS and microfabricated device characterisation.
- High aspect ratio structure measurements.
- Non-contact measurements of delicate or soft materials.
Benefits:
- Nanometre-scale vertical resolution for highly accurate surface metrology.
- Simultaneous acquisition of laser / optical images and 3D topography data.
- High-speed scanning and automated measurement workflows.
- Large-area stitching and automated XYZ mapping functions.
- Flexibility of inspect Si wafers up to 300 mm (12") in diameter.
- Max sample size: 100 mm in thickness, weight < 5000 g.
| Objective Lens | Numerical Aperture (N.A.) | Working Distance (W.D.) | Typical Applications |
| 10X | 0.30 | 10.4 mm | Large area imaging, taller samples, general inspection |
| 20X | 0.60 | 1.0 mm | Surface profiling, device characterisation, failure analysis |
| 50X | 0.95 | 0.35 mm | High-resolution imaging, roughness measurements, microstructures |
| 100X | 0.95 | 0.35 mm | Nanometre-scale surface features, semiconductor and photonic devices |
Location: Hawken Building 50, Room L116
Contact: Dr Elliot Cheng h.cheng6@uq.edu.au